Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406833 | Ion extraction optics having non uniform grid assembly | Alan V. Hayes, Christopher Campbell, Dmitry Lubomirsky | 2025-09-02 |
| 12400824 | Ion extraction optics having novel blocker configuration | Adam Calkins, Tyler Rockwell, Kevin M. Daniels, Christopher Campbell | 2025-08-26 |
| 12191117 | Compact low angle ion beam extraction assembly and processing apparatus | Jay Wallace, Solomon Belangedi Basame, Kevin Anglin, Tyler Rockwell | 2025-01-07 |
| 12144101 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | David Blahnik, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair | 2024-11-12 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Peter F. Kurunczi, Jay Wallace, Kevin M. Daniels, Kevin T. Ryan +3 more | 2024-04-02 |
| 11818830 | RF quadrupole particle accelerator | Frank Sinclair, Wai-Ming Tam, William Davis Lee | 2023-11-14 |
| 11812539 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | David Blahnik, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair | 2023-11-07 |
| 11710617 | Resonator coil having an asymmetrical profile | Michael Honan, Robert Brent Vopat, David Blahnik, Charles T. Carlson, Frank Sinclair +1 more | 2023-07-25 |
| 11596051 | Resonator, linear accelerator configuration and ion implantation system having toroidal resonator | Charles T. Carlson, Frank Sinclair, Paul J. Murphy, David Blahnik | 2023-02-28 |
| 11574800 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Anthony Renau, Christopher A. Rowland | 2023-02-07 |
| 11495430 | Tunable extraction assembly for wide angle ion beam | Jay Wallace, Kevin M. Daniels | 2022-11-08 |
| 11424112 | Transparent halo assembly for reduced particle generation | Ernest E. Allen, Daniel McGillicuddy | 2022-08-23 |
| 11361935 | Apparatus and system including high angle extraction optics | Jay Wallace, Kevin M. Daniels, Frank Sinclair, Christopher Campbell | 2022-06-14 |
| 11270864 | Apparatus and system including extraction optics having movable blockers | Adam Calkins, Alexander C. Kontos, James Howarth | 2022-03-08 |
| 11226439 | System and method for forming surface relief gratings | Joseph C. Olson, Ludovic Godet | 2022-01-18 |
| 11127556 | Extraction apparatus and system for high throughput ion beam processing | Jon Ballou, James P. Buonodono | 2021-09-21 |
| 11094504 | Resonator coil having an asymmetrical profile | Michael Honan, Robert Brent Vopat, David Blahnik, Charles T. Carlson, Frank Sinclair +1 more | 2021-08-17 |
| 11056319 | Apparatus and system having extraction assembly for wide angle ion beam | Appu Naveen Thomas, Tyler Rockwell, Frank Sinclair, Christopher Campbell | 2021-07-06 |
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Frank Sinclair, Joseph C. Olson, Alexandre Likhanskii | 2020-09-01 |
| 10730082 | Apparatus and method for differential in situ cleaning | Glen Gilchrist, Shurong Liang, Christopher Campbell, Vikram Singh | 2020-08-04 |
| 10665433 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Anthony Renau, Christopher A. Rowland | 2020-05-26 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |
| 10468226 | Extraction apparatus and system for high throughput ion beam processing | Jon Ballou, James P. Buonodono | 2019-11-05 |
| 10395969 | Transparent halo for reduced particle generation | Ernest E. Allen, Frank Sinclair | 2019-08-27 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh, Kevin M. Daniels +3 more | 2019-03-05 |