Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Joseph C. Olson, Alexandre Likhanskii, Peter F. Kurunczi | 2019-01-29 |
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Victor M. Benveniste, Svetlana B. Radovanov | 2018-08-14 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Nini Munoz, Ludovic Godet, Anthony Renau | 2017-04-11 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Peter F. Kurunczi, Tyler Rockwell, Christopher Campbell, Vikram Singh, Svetlana B. Radovanov | 2016-12-06 |
| 9396902 | Gallium ION source and materials therefore | Craig R. Chaney, Neil J. Bassom, Benjamin Colombeau, Dennis Rodier | 2016-07-19 |
| 9299536 | Wide metal-free plasma flood gun | — | 2016-03-29 |
| 9293301 | In situ control of ion angular distribution in a processing apparatus | Nini Munoz, Ludovic Godet, Anthony Renau | 2016-03-22 |
| 9187832 | Extended lifetime ion source | David Sporleder, Jay T. Scheuer, Neil J. Bassom | 2015-11-17 |
| 9060411 | Hardware plasma interlock system | Alexander Soskov, Chris Leavitt | 2015-06-16 |
| 8901820 | Ribbon antenna for versatile operation and efficient RF power coupling | Craig R. Chaney | 2014-12-02 |
| 8809803 | Inductively coupled plasma ion source with multiple antennas for wide ion beam | Joseph C. Olson, Edward W. Bell, Manny Sieradzki | 2014-08-19 |
| 8659229 | Plasma attenuation for uniformity control | Peter F. Kurunczi, Frank Sinclair, Ludovic Godet, Ernest E. Allen | 2014-02-25 |
| 8590485 | Small form factor plasma source for high density wide ribbon ion beam generation | Jay T. Scheuer, Joseph C. Olson, Frank Sinclair, Daniel Distaso | 2013-11-26 |
| 8436318 | Apparatus for controlling the temperature of an RF ion source window | Frank Sinclair, Bon-Woong Koo, Victor M. Benveniste, Shardul S. Patel | 2013-05-07 |
| 8142607 | High density helicon plasma source for wide ribbon ion beam generation | Alexander S. Perel, Jay T. Scheuer | 2012-03-27 |
| 7999479 | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control | Jay T. Scheuer, Alexander S. Perel | 2011-08-16 |
| 7888662 | Ion source cleaning method and apparatus | Craig R. Chaney, Eric R. Cobb, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |
| 7812321 | Techniques for providing a multimode ion source | Peter F. Kurunczi, Rajesh Dorai, Wilhelm P. Platow | 2010-10-12 |
| 7652270 | Techniques for ion beam current measurement using a scanning beam current transformer | Joseph P. Dzengeleski | 2010-01-26 |