Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9060411 | Hardware plasma interlock system | Costel Biloiu, Alexander Soskov | 2015-06-16 |
| 8662095 | Booth with inflatable canopy | — | 2014-03-04 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Rajesh Dorai, Harold Persing, Jay T. Scheuer, Bon-Woong Koo +2 more | 2006-11-07 |