Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8877654 | Pulsed plasma to affect conformal processing | Helen L. Maynard, Vikram Singh, Svetlana B. Radovanov | 2014-11-04 |
| 8728587 | Closed loop process control of plasma processed materials | George D. Papasouliotis, Deven M. Raj | 2014-05-20 |
| 7687787 | Profile adjustment in plasma ion implanter | Ludovic Godet, George D. Papasouliotis, Ziwei Fang, Richard Appel, Vincent Deno +1 more | 2010-03-30 |
| 7638781 | Local pressure sensing in a plasma processing system | Steven R. Walther | 2009-12-29 |
| 7615748 | Outgassing rate detection | Steven R. Walther | 2009-11-10 |
| 7528389 | Profile adjustment in plasma ion implanter | Ziwei Fang, Richard Appel, Vincent Deno, Vikram Singh | 2009-05-05 |
| 7397048 | Technique for boron implantation | Vikram Singh, Edmund J. Winder, Timothy J. Miller, Ziwei Fang, Atul Gupta | 2008-07-08 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Rajesh Dorai, Jay T. Scheuer, Bon-Woong Koo, Bjorn O. Pedersen +2 more | 2006-11-07 |