Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8728587 | Closed loop process control of plasma processed materials | George D. Papasouliotis, Harold Persing | 2014-05-20 |
| 7586100 | Closed loop control and process optimization in plasma doping processes using a time of flight ion detector | Ludovic Godet, Bernard G. Lindsay, Timothy J. Miller, George D. Papasouliotis | 2009-09-08 |