Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351900 | Plasma based film modification for semiconductor devices | Vikram M. Bhosle | 2025-07-08 |
| 12165852 | Cover ring to mitigate carbon contamination in plasma doping chamber | Vikram M. Bhosle, Eric D. Hermanson, Christopher J. Leavitt, Jordan B. Tye | 2024-12-10 |
| 12094709 | Plasma treatment process to densify oxide layers | Jung Chan Lee, Mun Kyu Park, Jun Seok Lee, Euhngi Lee, Kyu-Ha Shim +5 more | 2024-09-17 |
| 11615945 | Plasma processing apparatus and techniques | Vikram M. Bhosle, Christopher J. Leavitt, Guillermo Colom | 2023-03-28 |
| 11545368 | Phosphorus fugitive emission control | Cuiyang Wang, Jun Seok Lee, Il-Woong Koo, Deven Raj Mittal, Peter G. Ryan, Jr. | 2023-01-03 |
| 11501972 | Sacrificial capping layer for passivation using plasma-based implant process | Vikram M. Bhosle, Nicholas P. T. Bateman, Jun Seok Lee, Deven Raj Mittal | 2022-11-15 |
| 11127601 | Phosphorus fugitive emission control | Cuiyang Wang, Jun Seok Lee, Il-Woong Koo, Deven Raj Mittal, Peter G. Ryan, Jr. | 2021-09-21 |
| 11120973 | Plasma processing apparatus and techniques | Vikram M. Bhosle, Christopher J. Leavitt, Guillermo Colom | 2021-09-14 |
| 10825653 | Method of improving ion beam quality in an implant system | John W. Graff, Bon-Woong Koo, John A. Frontiero, Nicholas PT Bateman, Vikram M. Bholse | 2020-11-03 |
| 10804075 | Method of improving ion beam quality in an implant system | John W. Graff, Bon-Woong Koo, John A. Frontiero, Nicholas PT Bateman, Vikram M. Bhosle | 2020-10-13 |
| 10290466 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Svetlana B. Radovanov +3 more | 2019-05-14 |
| 10217657 | Active substrate alignment system and method | Aaron P. Webb, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson | 2019-02-26 |
| 9865430 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Svetlana B. Radovanov +3 more | 2018-01-09 |
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Svetlana B. Radovanov | 2017-12-12 |
| 9793086 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Robert H. Bettencourt | 2017-10-17 |
| 9780250 | Self-aligned mask for ion implantation | Vikram M. Bhosle, Tapash Chakraborty, Prerna Goradia, Robert Jan Visser | 2017-10-03 |
| 9767987 | Method and system for modifying substrate relief features using ion implantation | Ludovic Godet, Patrick M. Martin, Vikram Singh | 2017-09-19 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Svetlana B. Radovanov | 2017-06-13 |
| 9659677 | Shielding device for substrate edge protection and method of using same | Aaron P. Webb, Charles T. Carlson, William T. Weaver, James D. Strassner | 2017-05-23 |
| 9524849 | Method of improving ion beam quality in an implant system | John W. Graff, Bon-Woong Koo, John A. Frontiero, Nicholas PT Bateman, Vikram M. Bhosle | 2016-12-20 |
| 9441290 | System and method of improving implant quality in a plasma-based implant system | Bon-Woong Koo, Min Sung JEON, Yong Tae Kim | 2016-09-13 |
| 9384937 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Robert H. Bettencourt | 2016-07-05 |
| 9123509 | Techniques for plasma processing a substrate | George D. Papasouliotis, Kamal Hadidi, Helen L. Maynard, Ludovic Godet, Vikram Singh +1 more | 2015-09-01 |
| 9034743 | Method for implant productivity enhancement | Peter F. Kurunczi, Bon-Woong Koo, John A. Frontiero, William T. Levay, Christopher J. Leavitt +3 more | 2015-05-19 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Joseph C. Olson, Vikram Singh, James P. Buonodono +4 more | 2015-01-20 |