Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269537 | Vacuum assembly for an ion implanter system | Steven C. Borichevsky | 2019-04-23 |
| 9793086 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Timothy J. Miller | 2017-10-17 |
| 9384937 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Timothy J. Miller | 2016-07-05 |
| 9068657 | Gate valve with improved seal arrangement | Steven C. Borichevsky | 2015-06-30 |