Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269537 | Vacuum assembly for an ion implanter system | Robert H. Bettencourt | 2019-04-23 |
| 10119529 | Cryopump arrangement for improved pump speed | Eric D. Hermanson | 2018-11-06 |
| 9336990 | Semiconductor process pumping arrangements | — | 2016-05-10 |
| 9068657 | Gate valve with improved seal arrangement | Robert H. Bettencourt | 2015-06-30 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |