| 12469740 |
Vacuum chucking of a substrate within a carrier |
— |
2025-11-11 |
|
| 12464605 |
Active cooling of quartz enveloped heaters in vacuum |
Dursun Moore, Julian G. Blake, Hillman Bailey, Paul Forderhase |
2025-11-04 |
|
| 12351406 |
Apparatuses and methods for handling optical devices of varying geometries |
Yaseer Arafath Ahamed, Neal Paul Ricks, Kangkang Wang |
2025-07-08 |
|
| 12191186 |
Actively clamped carrier assembly for processing tools |
Benjamin B. Riordon |
2025-01-07 |
|
| 12121925 |
Edge blackening for optical devices |
Kangkang Wang, Yaseer Arafath Ahamed, Yige Gao, Benjamin B. Riordon, Rami Hourani +2 more |
2024-10-22 |
$83,950,000 |
| 12084761 |
Multi-depth film for optical devices |
Karl J. Armstrong, Ludovic Godet, Brian Alexander Cohen, Wayne MCMILLAN, Benjamin B. Riordon |
2024-09-10 |
$81,152,000 |
| 11975422 |
Minimal contact gripping of thin optical devices |
Yaseer Arafath Ahamed, Kangkang Wang, Benjamin B. Riordon, Ludovic Godet |
2024-05-07 |
$105,661,000 |
| 11850621 |
Edge blackening for optical devices |
Kangkang Wang, Yaseer Arafath Ahamed, Yige Gao, Benjamin B. Riordon, Rami Hourani +2 more |
2023-12-26 |
$30,871,000 |
| 11715662 |
Actively clamped carrier assembly for processing tools |
Benjamin B. Riordon |
2023-08-01 |
$66,604,000 |
| 11608558 |
Multi-depth film for optical devices |
Karl J. Armstrong, Ludovic Godet, Brian Alexander Cohen, Wayne MCMILLAN, Benjamin B. Riordon |
2023-03-21 |
$36,722,000 |
| 11545375 |
Hybrid control system for workpiece heating |
Bradley M. Pomerleau, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer |
2023-01-03 |
$39,123,000 |
| 11524392 |
Minimal contact gripping of thin optical devices |
Yaseer Arafath Ahamed, Kangkang Wang, Benjamin B. Riordon, Ludovic Godet |
2022-12-13 |
$35,358,000 |
| 10903096 |
System and apparatus for process chamber window cooling |
Paul E. Pergande |
2021-01-26 |
|
| 10831112 |
Reticle processing system |
Charles T. Carlson, Robert Brent Vopat, Jeffrey Blahnik |
2020-11-10 |
$91,344,000 |
| 10522381 |
Aligner apparatus and methods |
Yaseer Arafath Ahamed |
2019-12-31 |
$41,069,000 |
| 10256132 |
Reticle processing system |
Charles T. Carlson, Robert Brent Vopat, Jeffrey Blahnik |
2019-04-09 |
|
| 10217657 |
Active substrate alignment system and method |
Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, Charles T. Carlson |
2019-02-26 |
|
| 9659677 |
Shielding device for substrate edge protection and method of using same |
Aaron P. Webb, Charles T. Carlson, William T. Weaver, Timothy J. Miller |
2017-05-23 |
|
| 9490153 |
Mechanical alignment of substrates to a mask |
Aaron P. Webb, Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher N. Grant |
2016-11-08 |
|
| 9121879 |
Techniques for improving reliability of a fault current limiting system |
Kasegn D. Tekletsadik, Paul J. Murphy, Mark R. Amato |
2015-09-01 |
|
| 9082799 |
System and method for 2D workpiece alignment |
William T. Weaver, Charles T. Carlson, Scott Alan Smith, Michael Beck, Aaron P. Webb +2 more |
2015-07-14 |
|
| 8991785 |
Methods and apparatus for sealing a slit valve door |
Angela Rose Sico, Michael R. Rice |
2015-03-31 |
$7,138,000 |
| 8654486 |
Superconducting fault current limiter system |
Mark R. Amato, Paul J. Murphy |
2014-02-18 |
|
| 8611056 |
Superconducting fault current limiter |
Mark R. Amato, Paul J. Murphy |
2013-12-17 |
|
| 6841200 |
Dual wafer load lock |
Joseph A. Kraus |
2005-01-11 |
$26,821,000 |
