System and method for 2D workpiece alignment

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• William T. Weaver (74 patents)
• Charles T. Carlson (78 patents)
• Scott Alan Smith (4 patents)
• Michael Beck (7 patents)
• Aaron P. Webb (17 patents)
• James D. Strassner (26 patents)
• Lawrence R. Gravell (18 patents)
• Michael C. Simmons (13 patents)

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