Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum chucking of a substrate within a carrier

Vacuum chucking of a substrate within a carrier

US Patent 12469740 · Granted Nov 11, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Active cooling of quartz enveloped heaters in vacuum2025
Apparatuses and methods for handling optical devices of varying geometries2025
Actively clamped carrier assembly for processing tools2025
Edge blackening for optical devices2024
Multi-depth film for optical devices2024
Minimal contact gripping of thin optical devices2024
Edge blackening for optical devices2023
Actively clamped carrier assembly for processing tools2023
Multi-depth film for optical devices2023
Hybrid control system for workpiece heating2023
Minimal contact gripping of thin optical devices2022
System and apparatus for process chamber window cooling2021