| 11610787 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2023-03-21 |
| 10854478 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2020-12-01 |
| 10541157 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2020-01-21 |
| 9478446 |
Load lock chamber |
Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2016-10-25 |
| 8676375 |
Automated cassette-to-cassette substrate handling system |
Jeremy James Boyer, Joseph A. Mack, Michael DeChellis, Michael Koo |
2014-03-18 |
| 8662812 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2014-03-04 |
| 8562746 |
Sectional wafer carrier |
Alexander I. Gurary, Ajit Paranjpe, William E. Quinn, David A. Crewe |
2013-10-22 |
| 8272825 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, William J. Fosnight +3 more |
2012-09-25 |
| 8082741 |
Integral facet cryopump, water vapor pump, or high vacuum pump |
Allen J. Bartlett, Michael J. Eacobacci |
2011-12-27 |
| 6841200 |
Dual wafer load lock |
James D. Strassner |
2005-01-11 |
| 6776567 |
Valve/sensor assemblies |
Brian Wayne Johnson, Edward Ng, Justin Mauck, Edward R. Dykes |
2004-08-17 |
| 6558509 |
Dual wafer load lock |
James D. Strassner |
2003-05-06 |
| 6553280 |
Valve/sensor assemblies |
Brian Wayne Johnson, Edward Ng, Justin Mauck, Edward R. Dykes |
2003-04-22 |
| 6145673 |
Wafer transfer cassette |
Brian H. Burrows, Gregory S. Verdict |
2000-11-14 |
