| 11732931 |
Pneumatic drive cryocooler |
Matteo F. Salvetti, Sergei Syssoev, Mark A. Stira |
2023-08-22 |
| 11466673 |
Cryopump with peripheral first and second stage arrays |
Gerald M. Szarek, Paul K. Mahoney |
2022-10-11 |
| 11215384 |
System and method for cryogenic cooling |
William L. Johnson, Mark A. Collins, Sergei Syssoev, James A. O'Neil, Michael J. Eacobacci |
2022-01-04 |
| 11209193 |
Pneumatic drive cryocooler |
Matteo F. Salvetti, Sergei Syssoev, Mark A. Stira |
2021-12-28 |
| 10900699 |
Helium management control system |
Oliver J. Dumas, Maureen C. Buonpane, Doreen J. Ball-DiFazio, Ronald N. Morris, Leonard A. Loranger +4 more |
2021-01-26 |
| 10760562 |
Pressure burst free high capacity cryopump |
Michael A. Driscoll, Michael J. Eacobacci, William L. Johnson, Robert P. Sullivan, Sergei Syssoev +2 more |
2020-09-01 |
| 10632399 |
Multi-refrigerator high speed cryopump |
Michael J. Eacobacci, Sergei Syssoev |
2020-04-28 |
| 10288052 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2019-05-14 |
| 10156386 |
System and method for cryogenic cooling |
William L. Johnson, Mark A. Collins, Sergei Syssoev, James A. O'Neil, Michael J. Eacobacci |
2018-12-18 |
| 10113781 |
Helium management control system |
Oliver J. Dumas, Maureen C. Buonpane, Doreen J. Ball-DiFazio, Ronald N. Morris, Leonard A. Loranger +4 more |
2018-10-30 |
| 9926919 |
Cryopump |
Sergei Syssoev, John J. Casello, Jeffrey A. Wells, Michael J. Eacobacci |
2018-03-27 |
| 9687753 |
Multi-refrigerator high speed cryopump |
Michael J. Eacobacci, Sergei Syssoev |
2017-06-27 |
| 9334859 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2016-05-10 |
| 9266038 |
Cryopump |
Sergei Syssoev, John J. Casello, Jeffrey A. Wells, Michael J. Eacobacci |
2016-02-23 |
| 9266039 |
Cryopump with controlled hydrogen gas release |
Michael J. Eacobacci, John J. Casello, Jeffrey A. Wells |
2016-02-23 |
| 8869552 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2014-10-28 |
| 8413452 |
Linear drive cryogenic refrigerator |
Ronald N. Morris, Bruce R. Andeen |
2013-04-09 |
| 8261562 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2012-09-11 |
| 8082741 |
Integral facet cryopump, water vapor pump, or high vacuum pump |
Joseph A. Kraus, Michael J. Eacobacci |
2011-12-27 |
| 7788942 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2010-09-07 |
| 7320224 |
Method and apparatus for detecting and measuring state of fullness in cryopumps |
Gary S. Ash, James A. O'Neil, Bruce R. Andeen |
2008-01-22 |
| 7313922 |
High conductance cryopump for type III gas pumping |
John Nordborg, Brian Thompson |
2008-01-01 |
| 7194867 |
Integrated rough/purge/vent (RPV) valve |
Gary S. Ash, Brian Thompson, Mark A. Stira |
2007-03-27 |
| 7127901 |
Helium management control system |
Paul E. Dresens, Gary S. Ash, Bruce R. Andeen, Y. Roberto Than, Joseph Chopy, Jr. |
2006-10-31 |
| 7024866 |
Axial loaded seal system with a static L-seal |
Russell M. Sylvia, Mark Edwin Housman |
2006-04-11 |