| 11215384 |
System and method for cryogenic cooling |
Allen J. Bartlett, William L. Johnson, Mark A. Collins, Sergei Syssoev, James A. O'Neil |
2022-01-04 |
|
| 10760562 |
Pressure burst free high capacity cryopump |
Allen J. Bartlett, Michael A. Driscoll, William L. Johnson, Robert P. Sullivan, Sergei Syssoev +2 more |
2020-09-01 |
|
| 10632399 |
Multi-refrigerator high speed cryopump |
Allen J. Bartlett, Sergei Syssoev |
2020-04-28 |
|
| 10156386 |
System and method for cryogenic cooling |
Allen J. Bartlett, William L. Johnson, Mark A. Collins, Sergei Syssoev, James A. O'Neil |
2018-12-18 |
$20,022,000 |
| 9926919 |
Cryopump |
Sergei Syssoev, Allen J. Bartlett, John J. Casello, Jeffrey A. Wells |
2018-03-27 |
$18,404,000 |
| 9687753 |
Multi-refrigerator high speed cryopump |
Allen J. Bartlett, Sergei Syssoev |
2017-06-27 |
$3,592,000 |
| 9266038 |
Cryopump |
Sergei Syssoev, Allen J. Bartlett, John J. Casello, Jeffrey A. Wells |
2016-02-23 |
$2,232,000 |
| 9266039 |
Cryopump with controlled hydrogen gas release |
Allen J. Bartlett, John J. Casello, Jeffrey A. Wells |
2016-02-23 |
$2,232,000 |
| 8082741 |
Integral facet cryopump, water vapor pump, or high vacuum pump |
Allen J. Bartlett, Joseph A. Kraus |
2011-12-27 |
$3,706,000 |
| 7155919 |
Cryopump temperature control of arrays |
Donald A. Olsen, Peter W. Gaudet, John T. Harvell |
2007-01-02 |
|
| 6755028 |
Electronically controlled cryopump |
Peter W. Gaudet, Donald A. Olsen |
2004-06-29 |
$5,935,000 |
| 6510697 |
System and method for recovering from a power failure in a cryopump |
Maureen C. Buonpane, Philip D. Acomb, Brian Foley, Stephen J. Yamartino, Robert M. Patterson |
2003-01-28 |
$3,785,000 |
| 6022195 |
Electronically controlled vacuum pump with control module |
Peter W. Gaudet, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier +3 more |
2000-02-08 |
$15,149,000 |
| 5906102 |
Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve |
Allen J. Bartlett, Joseph P. Johnson |
1999-05-25 |
$2,872,000 |
| 5819545 |
Cryopump with selective condensation and defrost |
Stephen R. Matte |
1998-10-13 |
$1,958,000 |
| 5775109 |
Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor |
Stephen J. Yamartino, Martin Stein, Robert E. Khederian |
1998-07-07 |
$3,111,000 |
| 5517823 |
Pressure controlled cryopump regeneration method and system |
Bruce R. Andeen, Gerald J. Fortier, Allen J. Bartlett, Philip C. Lessard |
1996-05-21 |
$5,571,000 |
| 5157928 |
Electronically controlled cryopump |
Peter W. Gaudet, Donald A. Olsen, John T. Harvell, Robert J. Lepofsky, David E. Roche +1 more |
1992-10-27 |
$816,000 |
| 4918930 |
Electronically controlled cryopump |
Peter W. Gaudet, Donald A. Olsen, John T. Harvell, Robert J. Lepofsky, David E. Roche +1 more |
1990-04-24 |
$272,000 |
| 4655046 |
Cryopump with exhaust filter |
David C. Planchard |
1987-04-07 |
$499,000 |
| 4577465 |
Oil free vacuum system |
Donald A. Olsen |
1986-03-25 |
$532,000 |
| 4546613 |
Cryopump with rapid cooldown and increased pressure |
Donald A. Olsen |
1985-10-15 |
$279,000 |