| 7413411 |
Electronically controlled vacuum pump |
Peter W. Gaudet, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2008-08-19 |
| 6902378 |
Electronically controlled vacuum pump |
Peter W. Gaudet, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2005-06-07 |
| 6474080 |
Cryopump system with modular electronics |
John J. Varone, Daniel R. Jankins |
2002-11-05 |
| 6461113 |
Electronically controlled vacuum pump |
Peter W. Gaudet, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2002-10-08 |
| 6318091 |
Cryopump system with modular electronics |
John J. Varone, Daniel R. Jankins |
2001-11-20 |
| 6022195 |
Electronically controlled vacuum pump with control module |
Peter W. Gaudet, Michael J. Eacobacci, David E. Roche, Alan L. Weeks, Gerald J. Fortier +3 more |
2000-02-08 |
| 5443368 |
Turbomolecular pump with valves and integrated electronic controls |
Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte', Peter W. Gaudet, Martin Stein +1 more |
1995-08-22 |
| 5157928 |
Electronically controlled cryopump |
Peter W. Gaudet, Donald A. Olsen, Michael J. Eacobacci, John T. Harvell, David E. Roche +1 more |
1992-10-27 |
| 4918930 |
Electronically controlled cryopump |
Peter W. Gaudet, Donald A. Olsen, Michael J. Eacobacci, John T. Harvell, David E. Roche +1 more |
1990-04-24 |
| 4910965 |
Means for periodic desorption of a cryopump |
Bruce R. Andeen, Gerald R. Pruitt |
1990-03-27 |