| 7413411 |
Electronically controlled vacuum pump |
Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2008-08-19 |
| 7155919 |
Cryopump temperature control of arrays |
Donald A. Olsen, Michael J. Eacobacci, John T. Harvell |
2007-01-02 |
| 6902378 |
Electronically controlled vacuum pump |
Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2005-06-07 |
| 6755028 |
Electronically controlled cryopump |
Donald A. Olsen, Michael J. Eacobacci |
2004-06-29 |
| 6460351 |
Electronically controlled cryopump |
Donald A. Olsen |
2002-10-08 |
| 6461113 |
Electronically controlled vacuum pump |
Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more |
2002-10-08 |
| 6318093 |
Electronically controlled cryopump |
Donald A. Olsen |
2001-11-20 |
| 6022195 |
Electronically controlled vacuum pump with control module |
Michael J. Eacobacci, Robert J. Lepofsky, David E. Roche, Alan L. Weeks, Gerald J. Fortier +3 more |
2000-02-08 |
| 5450316 |
Electronic process controller having password override |
Donald A. Olsen, Steven A. Bender |
1995-09-12 |
| 5443368 |
Turbomolecular pump with valves and integrated electronic controls |
Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte', Martin Stein, Steven C. Rosner +1 more |
1995-08-22 |
| 5343708 |
Electronically controlled cryopump |
Donald A. Olsen |
1994-09-06 |
| 5265431 |
Electronically controlled cryopump and network interface |
Paul E. Amundsen |
1993-11-30 |
| 5176004 |
Electronically controlled cryopump and network interface |
— |
1993-01-05 |
| 5157928 |
Electronically controlled cryopump |
Donald A. Olsen, Michael J. Eacobacci, John T. Harvell, Robert J. Lepofsky, David E. Roche +1 more |
1992-10-27 |
| 4918930 |
Electronically controlled cryopump |
Donald A. Olsen, Michael J. Eacobacci, John T. Harvell, Robert J. Lepofsky, David E. Roche +1 more |
1990-04-24 |
| 4835972 |
Flex-line vibration isolator and cryopump with vibration isolation |
Halil Tugal |
1989-06-06 |