Electronically controlled cryopump

Assignee

• Helix Technology

Inventors

• Peter W. Gaudet (16 patents)
• Donald A. Olsen (12 patents)
• Michael J. Eacobacci (22 patents)
• John T. Harvell (6 patents)
• Robert J. Lepofsky (10 patents)
• David E. Roche (3 patents)
• Steven A. Bender (3 patents)

View full patent text on Google Patents →