Pressure burst free high capacity cryopump

Assignee

• Edwards Vacuum

Inventors

• Allen J. Bartlett (49 patents)
• Michael A. Driscoll (1 patents)
• Michael J. Eacobacci (22 patents)
• William L. Johnson (151 patents)
• Robert P. Sullivan (23 patents)
• Sergei Syssoev (13 patents)
• Mark A. Stira (6 patents)
• John J. Casello (7 patents)

View full patent text on Google Patents →