Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6510697 | System and method for recovering from a power failure in a cryopump | Maureen C. Buonpane, Philip D. Acomb, Brian Foley, Michael J. Eacobacci, Robert M. Patterson | 2003-01-28 |
| 6327863 | Cryopump with gate valve control | Brett W. Allen, Carl H. Geden | 2001-12-11 |
| 5862671 | Purge and rough cryopump regeneration process, cryopump and controller | Philip A. Lessard, Paul E. Dresens, Maureen C. Buonpane, Timothy M. Pulling, Alan C. Brightman +5 more | 1999-01-26 |
| 5775109 | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor | Michael J. Eacobacci, Martin Stein, Robert E. Khederian | 1998-07-07 |
| 5375424 | Cryopump with electronically controlled regeneration | Allen J. Bartlett | 1994-12-27 |
| 5156007 | Cryopump with improved second stage passageway | Allen J. Bartlett, Philip A. Lessard, John T. Harvell | 1992-10-20 |
| 5137050 | Pressure relief valve and cryopump utilizing the same | Hans T. Clarke, Thomas J. Dunn | 1992-08-11 |