| 5862671 |
Purge and rough cryopump regeneration process, cryopump and controller |
Paul E. Dresens, Maureen C. Buonpane, Timothy M. Pulling, Alan C. Brightman, Robert M. Patterson +5 more |
1999-01-26 |
| 5483803 |
High conductance water pump |
Stephen R. Matte, Alan L. Weeks |
1996-01-16 |
| 5261244 |
Cryogenic waterpump |
Douglas Aitken, Robert D. Bradford, Roland P. Graham, Steven A. Michaud, Karen J. Manning |
1993-11-16 |
| 5156007 |
Cryopump with improved second stage passageway |
Allen J. Bartlett, Stephen J. Yamartino, John T. Harvell |
1992-10-20 |
| RE33878 |
Cryogenic recondenser with remote cold box |
Allen J. Bartlett, Bruce R. Andeen |
1992-04-14 |
| 5001903 |
Optimally staged cryopump |
Thomas J. Dunn |
1991-03-26 |
| 4896511 |
Optimally staged cryopump |
Thomas J. Dunn |
1990-01-30 |
| 4860546 |
Vacuum system with molecular flow line |
John T. Harvell |
1989-08-29 |
| 4766741 |
Cryogenic recondenser with remote cold box |
Allen J. Bartlett, Bruce R. Andeen |
1988-08-30 |
| 4718241 |
Cryopump with quicker adsorption |
Bruce R. Andeen |
1988-01-12 |
| 4708165 |
High pressure stepped clearance seal valve in a cryogenic refrigeration system |
Marshall J. Smith |
1987-11-24 |
| 4679401 |
Temperature control of cryogenic systems |
Allen J. Bartlett, John Peterson |
1987-07-14 |
| 4494381 |
Cryopump with improved adsorption capacity |
— |
1985-01-22 |
| 4466251 |
Fluid actuator for cryogenic valve |
Fred F. Chellis |
1984-08-21 |
| 4438632 |
Means for periodic desorption of a cryopump |
Allen J. Bartlett |
1984-03-27 |