Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322644 | Reactor with centering pin for epitaxial deposition | Sandeep Krishnan, Aniruddha Bagchi, Yuliy Rashkovsky, Siddharth Patel | 2025-06-03 |
| 12104242 | Deposition system with integrated carrier cleaning modules | Mandar Deshpande, Ajit Paranjpe | 2024-10-01 |
| D921431 | Multi-filament heater assembly | Sandeep Krishnan, Bojan Mitrovic, Aniruddha Bagchi, Chenghung Paul Chang, Ian Kunsch +1 more | 2021-06-08 |
| 10718052 | Rotating disk reactor with ferrofluid seal for chemical vapor deposition | Louise S. Barriss, Richard Comunale, Roger P. Fremgen, Todd A. Luse, Robert W. Milgate, III +1 more | 2020-07-21 |
| D866491 | Chemical vapor deposition wafer carrier with thermal cover | Sandeep Krishnan, Yuliy Rashkovsky, Leo Chin, Mandar Deshpande | 2019-11-12 |
| D863239 | Chemical vapor deposition wafer carrier with thermal cover | Sandeep Krishnan, Yuliy Rashkovsky, Leo Chin, Mandar Deshpande | 2019-10-15 |
| 10438795 | Self-centering wafer carrier system for chemical vapor deposition | Sandeep Krishnan, Chenghung Paul Chang, Earl Marcelo | 2019-10-08 |
| D860147 | Chemical vapor deposition wafer carrier with thermal cover | Sandeep Krishnan, Yuliy Rashkovsky, Leo Chin, Mandar Deshpande | 2019-09-17 |
| D860146 | Wafer carrier with a 33-pocket configuration | Yuliy Rashkovsky, Mandar Deshpande, Sandeep Krishnan, Aniruddh Parekh | 2019-09-17 |
| D858469 | Chemical vapor deposition wafer carrier with thermal cover | Sandeep Krishnan, Yuliy Rashkovsky, Leo Chin, Mandar Deshpande | 2019-09-03 |
| D854506 | Chemical vapor deposition wafer carrier with thermal cover | Sandeep Krishnan, Yuliy Rashkovsky, Leo Chin, Mandar Deshpande | 2019-07-23 |
| 10316412 | Wafter carrier for chemical vapor deposition systems | Sandeep Krishnan, Jeffrey Scott Montgomery, Lukas Urban, Yuliy Rashkovsky | 2019-06-11 |
| 10136472 | Terminal for mechanical support of a heating element | Arno Plankensteiner, Christian Peter Feist, Vadim Boguslavskiy, Chenghung Paul Chang | 2018-11-20 |
| 10134617 | Wafer carrier having thermal cover for chemical vapor deposition systems | Eric A. Armour | 2018-11-20 |
| 10002805 | Processing methods and apparatus with temperature distribution control | Mikhail Belousov, Vadim Boguslavskiy, Bojan Mitrovic | 2018-06-19 |
| D819580 | Self-centering wafer carrier for chemical vapor deposition | Sandeep Krishnan, Chenghung Paul Chang, Earl Marcelo | 2018-06-05 |
| 9982362 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Bojan Mitrovic, William E. Quinn, Eric A. Armour | 2018-05-29 |
| D810705 | Self-centering wafer carrier for chemical vapor deposition | Sandeep Krishnan, Chenghung Paul Chang, Earl Marcelo | 2018-02-20 |
| D806046 | Wafer carrier with a multi-pocket configuration | Mandar Deshpande, Aniruddh Parekh, Yuliy Rashkovsky | 2017-12-26 |
| 9816184 | Keyed wafer carrier | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2017-11-14 |
| 9677944 | Temperature control for GaN based materials | Mikhail Belousov, Guray Tas | 2017-06-13 |
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour +2 more | 2017-05-16 |
| D778247 | Wafer carrier with a multi-pocket configuration | Mandar Deshpande, Aniruddh Parekh, Yuliy Rashkovsky | 2017-02-07 |
| 9388493 | Self-cleaning shutter for CVD reactor | Chenghung Paul Chang, Keng Moy | 2016-07-12 |
| 9273413 | Wafer carrier with temperature distribution control | Sandeep Krishnan, Keng Moy | 2016-03-01 |