Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D748591 | Keyed spindle | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2016-02-02 |
| D744967 | Spindle key | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2015-12-08 |
| 9200965 | Temperature control for GaN based materials | Mikhail Belousov, Guray Tas | 2015-12-01 |
| 9053935 | Chemical vapor deposition with elevated temperature gas injection | Mikhail Belousov, Bojan Mitrovic | 2015-06-09 |
| D726133 | Keyed spindle | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2015-04-07 |
| 8958061 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour +2 more | 2015-02-17 |
| 8888360 | Methods and systems for in-situ pyrometer calibration | Vadim Boguslavskiy, Sandeep Krishnan, Matthew King | 2014-11-18 |
| D712852 | Spindle key | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2014-09-09 |
| D711332 | Multi-keyed spindle | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2014-08-19 |
| D695241 | Wafer carrier having pockets | Keng Moy, Chenghung Paul Chang | 2013-12-10 |
| D695242 | Wafer carrier having pockets | Keng Moy, Paul Chang | 2013-12-10 |
| 8562746 | Sectional wafer carrier | Joseph A. Kraus, Ajit Paranjpe, William E. Quinn, David A. Crewe | 2013-10-22 |
| D690671 | Wafer carrier having pockets | Keng Moy, Chenghung Paul Chang | 2013-10-01 |
| D687790 | Keyed wafer carrier | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2013-08-13 |
| D687791 | Multi-keyed wafer carrier | Sandeep Krishnan, Keng Moy, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek | 2013-08-13 |
| D686175 | Wafer carrier having pockets | Keng Moy, Paul Chang | 2013-07-16 |
| 8231940 | Wafer processing method with carrier hub removal | Vadim Boguslavskiy | 2012-07-31 |
| 8092599 | Movable injectors in rotating disc gas reactors | Piero Sferlazzo, Eric A. Armour, William E. Quinn, Steve Ting | 2012-01-10 |
| 8021487 | Wafer carrier with hub | Vadim Boguslavskiy | 2011-09-20 |
| 7666323 | System and method for increasing the emissivity of a material | Vadim Boguslavskiy | 2010-02-23 |
| 7452125 | Calibration wafer and method of calibrating in situ temperatures | Boris Volf, Mikhail Belousov | 2008-11-18 |
| 7275861 | Calibration wafer and method of calibrating in situ temperatures | Boris Volf, Mikhail Belousov | 2007-10-02 |
| 6902623 | Reactor having a movable shutter | Scott Elman, Keng Moy, Vadim Boguslavskiy | 2005-06-07 |
| 6726769 | Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition | Vadim Boguslavskiy | 2004-04-27 |
| 6685774 | Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition | Vadim Boguslavskiy | 2004-02-03 |