Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547876 | Apparatus for growing epitaxial layers on wafers by chemical vapor deposition | Ian Ferguson, Michael A. Spencer | 2003-04-15 |
| 6506252 | Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition | Vadim Boguslavskiy | 2003-01-14 |
| 6492625 | Apparatus and method for controlling temperature uniformity of substrates | Vadim Boguslavskiy, Ameesh Patel, Jeffrey C. Ramer | 2002-12-10 |
| 6398406 | Temperature determination using pyrometry | William G. Breiland, Vadim Boguslavskiy | 2002-06-04 |
| 6368404 | Induction heated chemical vapor deposition reactor | Paul Thomas Fabiano, David Russell Voorhees, Scott Beherrell | 2002-04-09 |
| 6349270 | Method and apparatus for measuring the temperature of objects on a fast moving holder | Vadim Boguslavskiy, Ameesh Patel, Jeffrey C. Ramer | 2002-02-19 |
| 6197121 | Chemical vapor deposition apparatus | Richard A. Stall, Robert F. Karlicek, Jr., Peter Allen Zawadzki, Thomas Salagaj | 2001-03-06 |
| 6001183 | Wafer carriers for epitaxial growth processes | Eric A. Armour, Douglas A. Collins, Richard A. Stall | 1999-12-14 |
| 5840124 | Wafer carrier with flexible wafer flat holder | Scott Beherrell, Vadim Boguslavskiy | 1998-11-24 |
| 5835677 | Liquid vaporizer system and method | Ting Li, Dane C. Scott | 1998-11-10 |
| 5759281 | CVD reactor for uniform heating with radiant heating filaments | Scott Beherrell, Vadim Boguslavskiy | 1998-06-02 |
| 5544618 | Apparatus for depositing a coating on a substrate | Richard A. Stall, Gary S. Tompa, Craig R. Nelson | 1996-08-13 |
| 5336324 | Apparatus for depositing a coating on a substrate | Richard A. Stall, Gary S. Tompa, Craig R. Nelson | 1994-08-09 |