SB

Scott Beherrell

EM Emcore: 3 patents #57 of 226Top 30%
Overall (All Time): #1,615,239 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6368404 Induction heated chemical vapor deposition reactor Alexander I. Gurary, Paul Thomas Fabiano, David Russell Voorhees 2002-04-09
5840124 Wafer carrier with flexible wafer flat holder Alexander I. Gurary, Vadim Boguslavskiy 1998-11-24
5759281 CVD reactor for uniform heating with radiant heating filaments Alexander I. Gurary, Vadim Boguslavskiy 1998-06-02