| 7985295 |
RF heater arrangement for substrate heating apparatus |
— |
2011-07-26 |
| 7573004 |
Filament support arrangement for substrate heating apparatus |
— |
2009-08-11 |
| 6797336 |
Multi-component substances and processes for preparation thereof |
James Garvey, Stuart MacDonald, Robert L. DeLeon |
2004-09-28 |
| 6783745 |
Fullene based sintered carbon materials |
Oleg A. Voronov |
2004-08-31 |
| 6702934 |
Pulsed arc molecular beam deposition apparatus and methodology |
Robert L. DeLeon, James Garvey, Eric F. Rexer |
2004-03-09 |
| 6613198 |
Pulsed arc molecular beam process |
James Garvey, Stuart MacDonald |
2003-09-02 |
| 6289842 |
Plasma enhanced chemical vapor deposition system |
— |
2001-09-18 |
| 5650201 |
Method for producing carbon nitride films |
— |
1997-07-22 |
| 5544618 |
Apparatus for depositing a coating on a substrate |
Richard A. Stall, Alexander I. Gurary, Craig R. Nelson |
1996-08-13 |
| 5336324 |
Apparatus for depositing a coating on a substrate |
Richard A. Stall, Alexander I. Gurary, Craig R. Nelson |
1994-08-09 |