Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10017876 | Chemical vapor deposition flow inlet elements and methods | Bojan Mitrovic, Keng Moy | 2018-07-10 |
| 10002805 | Processing methods and apparatus with temperature distribution control | Alexander I. Gurary, Vadim Boguslavskiy, Bojan Mitrovic | 2018-06-19 |
| 9677944 | Temperature control for GaN based materials | Alexander I. Gurary, Guray Tas | 2017-06-13 |
| 9324590 | Processing methods and apparatus with temperature distribution control | Alex Gurary, Vadim Boguslavskiy, Bojan Mitrovic | 2016-04-26 |
| 9200965 | Temperature control for GaN based materials | Alexander I. Gurary, Guray Tas | 2015-12-01 |
| 9053935 | Chemical vapor deposition with elevated temperature gas injection | Alexander I. Gurary, Bojan Mitrovic | 2015-06-09 |
| 8937000 | Chemical vapor deposition with elevated temperature gas injection | Alex Gurary, Bojan Mitrovic | 2015-01-20 |
| 8895107 | Chemical vapor deposition with elevated temperature gas injection | Alex Gurary, Bojan Mitrovic | 2014-11-25 |
| 8636847 | Chemical vapor deposition flow inlet elements and methods | Bojan Mitrovic, Keng Moy | 2014-01-28 |
| 8441653 | Apparatus and method for batch non-contact material characterization | Dong Seung Lee, Eric A. Armour, William E. Quinn | 2013-05-14 |
| 8303713 | Chemical vapor deposition flow inlet elements and methods | Bojan Mitrovic, Keng Moy | 2012-11-06 |
| 8198605 | Apparatus and method for batch non-contact material characterization | Dong Seung Lee, Eric A. Armour, William E. Quinn | 2012-06-12 |
| 8022372 | Apparatus and method for batch non-contact material characterization | Dong Seung Lee, Eric A. Armour, William E. Quinn | 2011-09-20 |
| 7570368 | Method and apparatus for measuring the curvature of reflective surfaces | Boris Volf | 2009-08-04 |
| 7452125 | Calibration wafer and method of calibrating in situ temperatures | Boris Volf, Alexander I. Gurary | 2008-11-18 |
| 7275861 | Calibration wafer and method of calibrating in situ temperatures | Boris Volf, Alexander I. Gurary | 2007-10-02 |