Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677944 | Temperature control for GaN based materials | Alexander I. Gurary, Mikhail Belousov | 2017-06-13 |
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour +2 more | 2017-05-16 |
| 9448119 | Radiation thermometer using off-focus telecentric optics | Jing Zhou, Daewon Kwon | 2016-09-20 |
| 9200965 | Temperature control for GaN based materials | Alexander I. Gurary, Mikhail Belousov | 2015-12-01 |
| 9085824 | Control of stray radiation in a CVD chamber | Jing Zhou, Daewon Kwon | 2015-07-21 |
| 8958061 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour +2 more | 2015-02-17 |
| 8312772 | Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion | Sean P. Leary, Dario Alliata, Jana Clerico, Priya Mukundhan, Zhongning Dai | 2012-11-20 |
| 7903238 | Combination of ellipsometry and optical stress generation and detection | Manjusha Mehendale, Michael Kotelyanskii, Yanwen Hou, Jim Onderko | 2011-03-08 |
| 7019845 | Measuring elastic moduli of dielectric thin films using an optical metrology system | Sean P. Leary, Christopher Morath, Michael Kotelyanskii, Tong Zheng, Guenadiy Lazarov +3 more | 2006-03-28 |