Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9976909 | Control of stray radiation in a CVD chamber | Gurary Tas, Jing Zhou | 2018-05-22 |
| 9748113 | Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system | Eric A. Armour, George D. Papasouliotis | 2017-08-29 |
| 9627239 | Wafer surface 3-D topography mapping based on in-situ tilt measurements in chemical vapor deposition systems | — | 2017-04-18 |
| 9448119 | Radiation thermometer using off-focus telecentric optics | Guray Tas, Jing Zhou | 2016-09-20 |
| 9085824 | Control of stray radiation in a CVD chamber | Guray Tas, Jing Zhou | 2015-07-21 |
| 6934031 | Methods and apparatus for determining optical constants of semiconductors and dielectrics with interband states | — | 2005-08-23 |
| 6519045 | Method and apparatus for measuring very thin dielectric film thickness and creating a stable measurement environment | — | 2003-02-11 |