Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988641 | Characterization of patterned structures using acoustic metrology | Manjusha Mehendale, Michael Kotelyanskii, Robin Mair | 2024-05-21 |
| 10173249 | Calibration of semiconductor metrology systems | Jian Ding, James A. Kane, Steven Peterson, Fei Shen | 2019-01-08 |
| 9991176 | Non-destructive acoustic metrology for void detection | Manjusha Mehendale, Michael Kotelyanskii, Todd W. Murray, Robin Mair, Jacob D. Dove +3 more | 2018-06-05 |
| 9576862 | Optical acoustic substrate assessment system and method | Todd W. Murray, Manjusha Mehendale, Michael Kotelyanskii, Robin Mair | 2017-02-21 |
| 9140601 | Position sensitive detection optimization | Manjusha Mehendale, Michael Kotelyanskii, Michael Colgan, Wei Zhou | 2015-09-22 |
| 8312772 | Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion | Guray Tas, Sean P. Leary, Dario Alliata, Jana Clerico, Zhongning Dai | 2012-11-20 |