| 10017876 |
Chemical vapor deposition flow inlet elements and methods |
Mikhail Belousov, Bojan Mitrovic |
2018-07-10 |
| 9816184 |
Keyed wafer carrier |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2017-11-14 |
| D793972 |
Wafer carrier with a 31-pocket configuration |
Sandeep Krishnan |
2017-08-08 |
| 9388493 |
Self-cleaning shutter for CVD reactor |
Chenghung Paul Chang, Alexander I. Gurary |
2016-07-12 |
| 9273413 |
Wafer carrier with temperature distribution control |
Sandeep Krishnan, Alexander I. Gurary |
2016-03-01 |
| D748591 |
Keyed spindle |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2016-02-02 |
| D744967 |
Spindle key |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2015-12-08 |
| D726133 |
Keyed spindle |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2015-04-07 |
| D712852 |
Spindle key |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2014-09-09 |
| D711332 |
Multi-keyed spindle |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2014-08-19 |
| 8636847 |
Chemical vapor deposition flow inlet elements and methods |
Mikhail Belousov, Bojan Mitrovic |
2014-01-28 |
| D695242 |
Wafer carrier having pockets |
Alexander I. Gurary, Paul Chang |
2013-12-10 |
| D695241 |
Wafer carrier having pockets |
Alexander I. Gurary, Chenghung Paul Chang |
2013-12-10 |
| D690671 |
Wafer carrier having pockets |
Alexander I. Gurary, Chenghung Paul Chang |
2013-10-01 |
| D687791 |
Multi-keyed wafer carrier |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2013-08-13 |
| D687790 |
Keyed wafer carrier |
Sandeep Krishnan, Alexander I. Gurary, Matthew King, Vadim Boguslavskiy, Steven Krommenhoek |
2013-08-13 |
| D686582 |
Wafer carrier having pockets |
Sandeep Krishnan |
2013-07-23 |
| D686175 |
Wafer carrier having pockets |
Alexander I. Gurary, Paul Chang |
2013-07-16 |
| 8303713 |
Chemical vapor deposition flow inlet elements and methods |
Mikhail Belousov, Bojan Mitrovic |
2012-11-06 |
| 7276124 |
Reactor having a movable shutter |
Alex Gurary, Scott Elman, Vadim Boguslavskiy |
2007-10-02 |
| 6902623 |
Reactor having a movable shutter |
Alexander I. Gurary, Scott Elman, Vadim Boguslavskiy |
2005-06-07 |