| 12300528 |
Substrate transport apparatus |
Robert T. Caveney, Ulysses Gilchrist |
2025-05-13 |
| 12263587 |
Dual arm robot |
Robert T. Caveney, Martin R. Elliot, Christopher Hofmeister |
2025-04-01 |
| 12142511 |
Substrate processing apparatus |
Ulysses Gilchrist, Robert T. Caveney, Daniel Babbs |
2024-11-12 |
| 11894252 |
Substrate transport apparatus |
Robert T. Caveney, Ulysses Gilchrist |
2024-02-06 |
| 11801598 |
Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism |
Christopher Hofmeister, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy |
2023-10-31 |
| 11764093 |
Automatic wafer centering method and apparatus |
Leigh F. Sharrock |
2023-09-19 |
| 11613002 |
Dual arm robot |
Robert T. Caveney, Martin R. Elliot, Christopher Hofmeister |
2023-03-28 |
| 11610787 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more |
2023-03-21 |
| 11587813 |
Substrate transport apparatus |
Robert T. Caveney, Ulysses Gilchrist |
2023-02-21 |
| 11569111 |
Substrate processing apparatus |
Joseph Hallisey, Kevin M. Bourbeau, Emilien Audebrand |
2023-01-31 |
| 11088004 |
Automatic wafer centering method and apparatus |
Leigh F. Sharrock |
2021-08-10 |
| 10854478 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more |
2020-12-01 |
| 10737381 |
Dual arm robot |
Robert T. Caveney, Martin R. Elliot, Christopher Hofmeister |
2020-08-11 |
| 10541157 |
Load lock fast pump vent |
Christopher Hofmeister, Martin R. Elliott, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more |
2020-01-21 |
| 10418261 |
Workpiece handling modules |
John Underwood |
2019-09-17 |
| 10335945 |
Substrate transport appartatus with multiple movable arms utilizing a mechanical switch mechanism |
Christopher Hofmeister, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy |
2019-07-02 |
| 10134621 |
Substrate transport apparatus |
Robert T. Caveney, Ulysses Gilchrist |
2018-11-20 |
| 9623555 |
Dual arm robot |
Robert T. Caveney, Martin R. Elliott, Christopher Hofmeister |
2017-04-18 |
| 9478446 |
Load lock chamber |
Christopher Hofmeister, Martin R. Elliot, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more |
2016-10-25 |
| 9401294 |
Compact substrate transport system |
Christopher Hofmeister, Ulysses Gilchrist |
2016-07-26 |
| 9324594 |
Workpiece handling modules |
John Underwood |
2016-04-26 |
| 9117859 |
Compact processing apparatus |
Mitchell Drew |
2015-08-25 |
| 8960099 |
Substrate processing apparatus |
Martin Hosek, Christopher Hofmeister |
2015-02-24 |
| 8803513 |
Multiple dimension position sensor |
Martin Hosek, Christopher Hofmeister, John F. Zettler, Sergei Syssoev, Krzystof Majczak |
2014-08-12 |
| 8752449 |
Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism |
Christopher Hofmeister, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy |
2014-06-17 |