Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764093 | Automatic wafer centering method and apparatus | Alexander Krupyshev | 2023-09-19 |
| 11664259 | Process apparatus with on-the-fly substrate centering | — | 2023-05-30 |
| 11088004 | Automatic wafer centering method and apparatus | Alexander Krupyshev | 2021-08-10 |
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Sean E. PLAISTED, Chris Aitken | 2021-06-01 |
| 10879101 | Process apparatus with on-the-fly substrate centering | — | 2020-12-29 |
| 10607879 | Substrate processing apparatus | Jeffrey A. Cavins, Kyle M. Letourneau, Stacey McKinney, Dave Jarzynka | 2020-03-31 |
| 9812343 | Load station | Tsepa Bayul, Christopher J. Dancewicz, Wayne A. Lasante | 2017-11-07 |
| 9514974 | Process apparatus with on-the-fly substrate centering | — | 2016-12-06 |