Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Leigh F. Sharrock, Chris Aitken | 2021-06-01 |
| 7261528 | Scroll pump with load bearing synchronization device | Anthony G. Liepert | 2007-08-28 |