Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8680803 | Substrate processing apparatus with motors integral to chamber walls | Christopher Hofmeister | 2014-03-25 |
| 8662812 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliot, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2014-03-04 |
| 8562271 | Compact substrate transport system | Christopher Hofmeister, Ulysses Gilchrist | 2013-10-22 |
| 8509938 | Substrate apparatus calibration and synchronization procedure | — | 2013-08-13 |
| 8272825 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliot, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2012-09-25 |
| 8237391 | Substrate processing apparatus with motors integral to chamber walls | Christopher Hofmeister | 2012-08-07 |
| 8129984 | Multiple dimension position sensor | Martin Hosek, Christopher Hofmeister, John F. Zettler, Sergei Syssoev, Krzystof Majczak | 2012-03-06 |
| 8112171 | Substrate apparatus calibration and synchronization procedure | — | 2012-02-07 |
| 8008884 | Substrate processing apparatus with motors integral to chamber walls | Christopher Hofmeister | 2011-08-30 |
| 7880155 | Substrate alignment apparatus comprising a controller to measure alignment during transport | Sergei Syssoev | 2011-02-01 |
| 6944517 | Substrate apparatus calibration and synchronization procedure | — | 2005-09-13 |