Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12279359 | Linear accelerator assembly including flexible high-voltage connection | David Blahnik, Charles T. Carlson, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2025-04-15 |
| 12249522 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Jeffrey Blahnik, Charles T. Carlson | 2025-03-11 |
| 12185451 | Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber | Charles T. Carlson | 2024-12-31 |
| 11985756 | Linear accelerator coil including multiple fluid channels | Charles T. Carlson | 2024-05-14 |
| 11895766 | Linear accelerator assembly including flexible high-voltage connection | David Blahnik, Charles T. Carlson, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2024-02-06 |
| 11791176 | Processing chamber with annealing mini-environment | Michael Honan, David Blahnik, Jeffrey Blahnik, Charles T. Carlson | 2023-10-17 |
| 11710617 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, David Blahnik, Charles T. Carlson, Frank Sinclair +1 more | 2023-07-25 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |
| 11094504 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, David Blahnik, Charles T. Carlson, Frank Sinclair +1 more | 2021-08-17 |
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more | 2020-12-01 |
| 10854491 | Dynamic leveling process heater lift | Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman | 2020-12-01 |
| 10831112 | Reticle processing system | James D. Strassner, Charles T. Carlson, Jeffrey Blahnik | 2020-11-10 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |
| 10643867 | Annealing system and method | Jean Delmas, Charles T. Carlson | 2020-05-05 |
| 10597779 | Susceptor position and rational apparatus and methods of use | William T. Weaver, Joseph Yudovsky, Jason M. Schaller | 2020-03-24 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |
| 10446710 | Transfer chamber and method of using a transfer chamber | Aaron P. Webb, Charles T. Carlson, Paul Forderhase, William T. Weaver | 2019-10-15 |
| 10443934 | Substrate handling and heating system | Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, William T. Weaver | 2019-10-15 |
| 10427303 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing | William T. Weaver, Malcolm N. Daniel, JR., Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more | 2019-10-01 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Jason M. Schaller, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2019-05-07 |
| 10256132 | Reticle processing system | James D. Strassner, Charles T. Carlson, Jeffrey Blahnik | 2019-04-09 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10249525 | Dynamic leveling process heater lift | Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman | 2019-04-02 |
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Jason M. Schaller, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2018-10-16 |