Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899242 | Device and method for substrate heating during transport | Jason M. Schaller, Morgan Evans, Ala Moradian, David Blahnik, William T. Weaver | 2018-02-20 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Jason M. Schaller, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb, William T. Weaver | 2017-07-04 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9669552 | System and method for quick-swap of multiple substrates | Jason M. Schaller, William T. Weaver | 2017-06-06 |
| 9496117 | Two-dimensional mass resolving slit mechanism for semiconductor processing systems | Jason M. Schaller | 2016-11-15 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9287148 | Dynamic heating method and system for wafer processing | Morgan Evans, Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Jason M. Schaller | 2016-03-15 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Malcolm N. Daniel, JR., Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more | 2016-03-08 |
| 9214369 | Dynamic pitch substrate lift | Jason M. Schaller, Jeffrey Blahnik, Malcolm N. Daniel, JR. | 2015-12-15 |
| 9202734 | Electrostatic charge removal for solar cell grippers | Jason M. Schaller | 2015-12-01 |
| 9145271 | Optimization of conveyor belts used for workpiece processing | Malcolm N. Daniel, JR., Luke Bonecutter, Jason M. Schaller, Charles T. Carlson, William T. Weaver | 2015-09-29 |
| 9064920 | Electrostatic charge removal for solar cell grippers | Jason M. Schaller | 2015-06-23 |
| 9026249 | Robot calibration method | Jason M. Schaller, James McLane | 2015-05-05 |
| 9016998 | High throughput, low volume clamshell load lock | Jeffrey Blahnik, William T. Weaver | 2015-04-28 |
| 8920103 | Multi-cell rotary end effector mechanism with slip ring | Jason M. Schaller | 2014-12-30 |
| 8777284 | Venturi assisted gripper | Jason M. Schaller | 2014-07-15 |
| 8698104 | System and method for handling multiple workpieces for matrix configuration processing | William T. Weaver, Jaime A. Carrera, Aaron P. Webb, Charles T. Carlson | 2014-04-15 |
| 8330128 | Implant mask with moveable hinged mask segments | William T. Weaver, Charles T. Carlson | 2012-12-11 |