Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11754062 | Methods and systems for cooling a vacuum pump | Dustin J. Kreft | 2023-09-12 |
| 11293422 | Methods and systems for cooling a vacuum pump | Dustin J. Kreft | 2022-04-05 |
| 8698104 | System and method for handling multiple workpieces for matrix configuration processing | William T. Weaver, Robert Brent Vopat, Aaron P. Webb, Charles T. Carlson | 2014-04-15 |
| 6313596 | Detection system for substrate clamp | Gary Wyka, Van Hoskins | 2001-11-06 |
| 6166509 | Detection system for substrate clamp | Gary Wyka, Van Hoskins | 2000-12-26 |