| 8911193 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2014-12-16 |
| 8066466 |
Substrate processing sequence in a Cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2011-11-29 |
| 7798764 |
Substrate processing sequence in a cartesian robot cluster tool |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2010-09-21 |
| 7651306 |
Cartesian robot cluster tool architecture |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2010-01-26 |
| 7374391 |
Substrate gripper for a substrate handling robot |
Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2008-05-20 |
| 7374393 |
Method of retaining a substrate during a substrate transferring process |
Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more |
2008-05-20 |
| 6313596 |
Detection system for substrate clamp |
Gary Wyka, Jaime A. Carrera |
2001-11-06 |
| 6166509 |
Detection system for substrate clamp |
Gary Wyka, Jaime A. Carrera |
2000-12-26 |
