Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, Steven M. Anella, D. Jeffrey Lischer, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |
| 9026249 | Robot calibration method | Jason M. Schaller, Robert Brent Vopat | 2015-05-05 |
| 8073559 | Material transport systems using autonomous controls | Han Zhang | 2011-12-06 |
| 7361913 | Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control | Russell J. Low, Joseph C. Olson, David Roger Timberlake, Mark D. Saunders, James J. Cummings +2 more | 2008-04-22 |