Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749500 | Real time photoresist outgassing control system and method | Nevin H. Clay, Christopher Campbell | 2023-09-05 |
| 9936743 | Protective bridge | — | 2018-04-10 |
| 9299534 | Method and mechanism for erosion detection of defining apertures | Mark R. Amato, Nathan Roth | 2016-03-29 |
| 9006692 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2015-04-14 |
| 8853653 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2014-10-07 |
| 7361913 | Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control | Russell J. Low, Joseph C. Olson, James McLane, Mark D. Saunders, James J. Cummings +2 more | 2008-04-22 |