Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9738968 | Apparatus and method for controlling implant process | George M. Gammel, Morgan Evans, Stanislav S. Todorov, Gregory Gibilaro | 2017-08-22 |
| 9006692 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Frank Sinclair, Shengwu Chang +3 more | 2015-04-14 |
| 8853653 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Frank Sinclair, Shengwu Chang +3 more | 2014-10-07 |
| 7820987 | Predicting dose repeatability in an ion implantation | Morgan Evans, Steven R. Walther, Rekha Padmanabhan | 2010-10-26 |
| 7663125 | Ion beam current uniformity monitor, ion implanter and related method | William G. Callahan, Morgan Evans, George M. Gammel, Gregg Norris, Joseph C. Olson | 2010-02-16 |