Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7663125 | Ion beam current uniformity monitor, ion implanter and related method | Morgan Evans, George M. Gammel, Norman E. Hussey, Gregg Norris, Joseph C. Olson | 2010-02-16 |
| 7355188 | Technique for uniformity tuning in an ion implanter system | Joseph C. Olson, Jonathan Gerald England, Morgan Evans, Douglas Thomas Fielder, Gregg Norris +2 more | 2008-04-08 |
| 6374144 | Method and apparatus for controlling a system using hierarchical state machines | Gary Lee Viviani, Nick Parisi | 2002-04-16 |