Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9123509 | Techniques for plasma processing a substrate | George D. Papasouliotis, Kamal Hadidi, Helen L. Maynard, Ludovic Godet, Vikram Singh +1 more | 2015-09-01 |
| 8926850 | Plasma processing with enhanced charge neutralization and process control | Vikram Singh, Timothy J. Miller | 2015-01-06 |
| 8664561 | System and method for selectively controlling ion composition of ion sources | Kamal Hadidi, Rajesh Dorai, Vikram Singh, George D. Papasouliotis | 2014-03-04 |
| 8623171 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Christopher J. Leavitt | 2014-01-07 |
| 8344318 | Technique for monitoring and controlling a plasma process with an ion mobility spectrometer | Kamal Hadidi | 2013-01-01 |
| 7675730 | Techniques for detecting wafer charging in a plasma processing system | Steven R. Walther, Bon-Woong Koo | 2010-03-09 |
| 7586100 | Closed loop control and process optimization in plasma doping processes using a time of flight ion detector | Deven M. Raj, Ludovic Godet, Timothy J. Miller, George D. Papasouliotis | 2009-09-08 |
| 7453059 | Technique for monitoring and controlling a plasma process | Bon-Woong Koo, Ziwei Fang, Ludovic Godet, Vikram Singh, Vassilis Panayotis Vourloumis | 2008-11-18 |