Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Daniel Distaso, Ludovic Godet, Bon-Woong Koo +1 more | 2011-02-01 |
| 7524743 | Conformal doping apparatus and method | Atul Gupta, Vikram Singh, Timothy J. Miller | 2009-04-28 |
| 7397048 | Technique for boron implantation | Vikram Singh, Harold Persing, Timothy J. Miller, Ziwei Fang, Atul Gupta | 2008-07-08 |