Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138768 | Indirectly heated cathode ion source | Peter E. Maciejowski, Joseph C. Olson, Shengwu Chang, Leo V. Klos, Daniel Distaso +1 more | 2006-11-21 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Rajesh Dorai, Harold Persing, Jay T. Scheuer, Bon-Woong Koo +2 more | 2006-11-07 |
| 7126808 | Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping | Bon-Woong Koo, Jay T. Scheuer, Erik Mitchell | 2006-10-24 |
| 6762423 | Methods and apparatus for ion beam neutralization in magnets | Reuel B. Liebert | 2004-07-13 |
| 6653642 | Methods and apparatus for operating high energy accelerator in low energy mode | Peter E. Maciejowski, William G. Goodenough, Paul J. Murphy, Charles M. McKenna | 2003-11-25 |
| 6020592 | Dose monitor for plasma doping system | Reuel B. Liebert, Matthew J. Goeckner | 2000-02-01 |
| 4527620 | Apparatus for controlling thermal transfer in a cyclic vacuum processing system | Jonathan A. Jost | 1985-07-09 |