Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6998625 | Ion implanter having two-stage deceleration beamline | Nicholas R. White, Douglas Brown, Edward W. Bell, Svetlana B. Radovanov | 2006-02-14 |
| 6653642 | Methods and apparatus for operating high energy accelerator in low energy mode | Bjorn O. Pedersen, Peter E. Maciejowski, William G. Goodenough, Paul J. Murphy | 2003-11-25 |
| 6313475 | Acceleration and analysis architecture for ion implanter | Anthony Renau | 2001-11-06 |
| 6130436 | Acceleration and analysis architecture for ion implanter | Anthony Renau | 2000-10-10 |
| 5136171 | Charge neutralization apparatus for ion implantation system | Ka-Ngo Leung, Wulf B. Kunkel, Malcom D. Williams | 1992-08-04 |
| 4757208 | Masked ion beam lithography system and method | James E. Wood, John L. Bartelt, Ross D. Olney, J. William Ward, Charles W. Slayman | 1988-07-12 |
| 4752692 | Liquid metal ion source | Jerg B. Jergenson | 1988-06-21 |
| 4687940 | Hybrid focused-flood ion beam system and method | J. William Ward, John L. Bartelt, Robert L. Seliger | 1987-08-18 |
| 4686414 | Enhanced wetting of liquid metal alloy ion sources | Irwin R. Sharapata, William M. Clark, Jr. | 1987-08-11 |
| 4629931 | Liquid metal ion source | William M. Clark, Jr., William L. Johnson | 1986-12-16 |
| 4556798 | Focused ion beam column | William M. Clark, Jr., Robert L. Seliger | 1985-12-03 |
| 4383177 | Multipole implantation-isotope separation ion beam source | John H. Keller | 1983-05-10 |
| 4183780 | Photon enhanced reactive ion etching | H. Keith Willcox | 1980-01-15 |