Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406015 | Correlating open source component matching results using different scanning techniques | Damon Weinstein, Jagat Prakashchandra Parekh | 2025-09-02 |
| 7267520 | Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights | Peter L. Kellerman, Victor M. Benveniste, Kourosh Saadatmand, Mehran Asdigha | 2007-09-11 |
| 7166187 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Ali Shajii, David Tao, Mathias Koch, Hossein Zarrin | 2007-01-23 |
| 7072165 | MEMS based multi-polar electrostatic chuck | Peter L. Kellerman, Shu Qin | 2006-07-04 |
| 6998625 | Ion implanter having two-stage deceleration beamline | Charles M. McKenna, Nicholas R. White, Edward W. Bell, Svetlana B. Radovanov | 2006-02-14 |
| 6989545 | Device and method for measurement of beam angle and divergence | Robert D. Rathmell, Andrew M. Ray | 2006-01-24 |
| 6946403 | Method of making a MEMS electrostatic chuck | Peter L. Kellerman, Shu Qin, Ernie Allen | 2005-09-20 |
| 6905984 | MEMS based contact conductivity electrostatic chuck | Peter L. Kellerman, Shu Qin, Ernie Allen | 2005-06-14 |
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Ali Shajii, David Tao, Mathias Koch, Hossein Zarrin | 2004-08-31 |
| 6695886 | Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool | Robert D. Meadows, David Tao, Mathias Koch | 2004-02-24 |
| 6613387 | Protective reaction rinse for autodeposition coatings | Rajat K. Agarwal, William E. Fristad, Graham Butcher, Zafar Iqbal | 2003-09-02 |
| 5786030 | Spotting resistant gloss enhancement of autodeposition coating | Bashir M. Ahmed, William E. Fristad | 1998-07-28 |