Douglas Brown — 12 Patents at Axcelis Technologies

Douglas Brown has been granted 12 US patents while listed as an inventor at Axcelis Technologies. The first was granted in 1998 and the most recent in September 2025. Douglas Brown ranks #396,045 of 4,157,543 US inventors in our database (top 9.5%). Patent records list Douglas Brown in Danvers, MA, US.

Issued Patents All Time

Showing 1–12 of 12 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
12406015	Correlating open source component matching results using different scanning techniques	Damon Weinstein, Jagat Prakashchandra Parekh	2025-09-02
7267520	Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights	Peter L. Kellerman, Victor M. Benveniste, Kourosh Saadatmand, Mehran Asdigha	2007-09-11	$4,562,000
7166187	Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling	Ali Shajii, David Tao, Mathias Koch, Hossein Zarrin	2007-01-23	$3,311,000
7072165	MEMS based multi-polar electrostatic chuck	Peter L. Kellerman, Shu Qin	2006-07-04
6998625	Ion implanter having two-stage deceleration beamline	Charles M. McKenna, Nicholas R. White, Edward W. Bell, Svetlana B. Radovanov	2006-02-14	$15,005,000
6989545	Device and method for measurement of beam angle and divergence	Robert D. Rathmell, Andrew M. Ray	2006-01-24	$7,440,000
6946403	Method of making a MEMS electrostatic chuck	Peter L. Kellerman, Shu Qin, Ernie Allen	2005-09-20	$1,895,000
6905984	MEMS based contact conductivity electrostatic chuck	Peter L. Kellerman, Shu Qin, Ernie Allen	2005-06-14	$4,389,000
6783630	Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling	Ali Shajii, David Tao, Mathias Koch, Hossein Zarrin	2004-08-31	$4,811,000
6695886	Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool	Robert D. Meadows, David Tao, Mathias Koch	2004-02-24	$16,853,000
6613387	Protective reaction rinse for autodeposition coatings	Rajat K. Agarwal, William E. Fristad, Graham Butcher, Zafar Iqbal	2003-09-02
5786030	Spotting resistant gloss enhancement of autodeposition coating	Bashir M. Ahmed, William E. Fristad	1998-07-28

Douglas Brown — 12 Patents

Issued Patents All Time

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