MK

Mathias Koch

AT Axcelis Technologies: 3 patents #78 of 300Top 30%
Overall (All Time): #1,585,274 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7166187 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Ali Shajii, David Tao, Douglas Brown, Hossein Zarrin 2007-01-23
6783630 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Ali Shajii, David Tao, Douglas Brown, Hossein Zarrin 2004-08-31
6695886 Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool Douglas Brown, Robert D. Meadows, David Tao 2004-02-24