HZ

Hossein Zarrin

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #2,153,586 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7166187 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Ali Shajii, David Tao, Mathias Koch, Douglas Brown 2007-01-23
6783630 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Ali Shajii, David Tao, Mathias Koch, Douglas Brown 2004-08-31