Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7267520 | Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights | Peter L. Kellerman, Victor M. Benveniste, Kourosh Saadatmand, Douglas Brown | 2007-09-11 |
| 7119343 | Mechanical oscillator for wafer scan with spot beam | Kurt Cleveland, Jay Krishnasamy, Kan Ota | 2006-10-10 |
| 7112808 | Wafer 2D scan mechanism | Michael Ioannou, Joseph Ferrara | 2006-09-26 |
| 6987272 | Work piece transfer system for an ion beam implanter | Kan Ota | 2006-01-17 |
| 6046435 | Method of heating a substrate with multiple selectively deactuated heaters | Scott C. Holden, Lawrence R. Moschini, Darius Dilmaghani, Mario Valenza | 2000-04-04 |
| 5911896 | Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element | Scott C. Holden, Lawrence R. Moschini, Darius Dilmaghani, Mario Valenza | 1999-06-15 |